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报告内容摘要：
Bulk acoustic wave (BAW) resonator has been proven to be an effective sensor platform with the advantage of precise frequency counting in electronic measurement. Meanwhile, with the improvement of device fabrication and material growth techniques, the resonator can be made with very small size, especially thin film bulk acoustic wave resonators (FBARs) based on ZnO and AlN have attracted much interest for sensor applications due to their high operating frequency. In this talk, our recent studies on the modeling and experimental study of bulk acoustic wave resonator sensor will be presented. Quartz thickness shear mode (TSM) resonator has been used to characterize the viscoelastic properties of polymer-CNT nanocomposite thin films deposited on the resonators surface. The input electric admittance of multilayer loaded TSM acoustic wave resonator is derived using transfer matrix method by taking into account the acoustic wave impedance of the coating layer. The electric impedance spectra of the unloaded and loaded acoustic wave resonators are measured experimentally, and a data fitting approach is applied to extract the properties of the polymer nanocomposites films. Quartz TSM resonator was also investigated for in-situ and real time measurement of liquid flow rate. Both theoretical and experimental investigation shows the resonant frequency shift is in quadratic relationship with the flow rate. The results indicate that quartz TSM resonators can be used for flow sensors with characteristics of simplicity, fast response, and good repeatability. Dual mode FBARs based on c-axis tilted ZnO and AlN thin films have been studied. Pure thickness shear mode and thickness longitudinal mode are found to occur at specific tilt angles. The results show that c-axis tilted ZnO and AlN thin films may provide more opportunities for resonator design and for sensing applications with much high sensitivity.

报告人简介：
He received the B.S. and M.S. degrees in Materials Science and Engineering from Tsinghua University in 1987 and 1989, respectively, and the Ph.D. degree in Materials from the Pennsylvania State University in 1998.From 1998 to 2000, Dr. Wang was an R&D engineer and materials scientist in Lexmark International, Inc., Lexington, Kentucky, where he worked on piezoelectric and electrostatic microactuators for inkjet printhead development. He joined Pitt as an assistant professor in year 2000, and was promoted to associate professor with tenure and full professor in year 2006 and year 2011, respectively.
Dr.Wang’s primary research interests are in microelectromechanical systems (MEMS) and microfabrication; thin film bulk acoustic wave resonators (FBAR) and acoustic wave sensors; functional nanomaterials and devices; and piezoelectric and electrostrictive thin films and composites for transducer, actuator, and sensor applications. He was the recipient of the Outstanding Paper Award by the IEEE-Ultraonics, Ferroelectric and Frequency Control Society (UFFC-S) in year 2006. He has been nominated and awarded for two terms the William Kepler Whiteford Faculty Fellow by the Swanson School of Engineering, University of Pittsburgh, 2007-2009 and 2009-2012. He is a member of IEEE, IEEE-UFFC, the Materials Research Society (MRS), ASME, and the American Ceramic Society.